Manufacturing Plants & Equipment

Wafer Plants

Manufacturing Facility

➤ SSP/ DSP/ SOI & POI wafer production plant：

  ● Area：6000 m²

  ● Class 10：1000 m²



➤ Silicon epitaxial wafer production plant：

  ● Area：5000 m²

  ● Class 10：3500 m²



➤ SiC epitaxial wafer production plant：

  ● Area：4000 m²

  ● Class 10：1200 m²



➤ Compound production plant ：

  ● Area：14000 m² (under construction)


Wafer Capacity

(Equivalent to 6”)

Metrology

FTIR

MVC

SRP Inspection Equipment

SRP

WLTT Inspection Equipment

WLTT

AFM

HALL Inspection Equipment

HALL

4PP

QC

S600

ADE

MC Inspection Equipment

MC

ICPMS

KLA8520

Quality System/Certificate

Quality

● ISO 9001

● ISO 45001

● ISO 14001

● IATF 16949

Manufacturing

● MES

● ERP

● SPC

Fab

● FMCS

● Whole fab monitoring

Quality Certificate