Wafer Plants

➤ SSP/ DSP/ SOI & POI wafer production plant：   ● Area：6000 m²   ● Class 10：1000 m²

➤ Silicon epitaxial wafer production plant：   ● Area：5000 m²   ● Class 10：3500 m²

➤ SiC epitaxial wafer production plant：   ● Area：4000 m²   ● Class 10：1200 m²

➤ Compound production plant ：   ● Area：14000 m² (under construction)

Wafer Capacity

(Equivalent to 6”)

Metrology

FTIR

MVC

SRP

WLTT

AFM

HALL

4PP

QC

S600

ADE

MC

ICPMS

KLA8520

Quality System/Certificate

Quality

● ISO 9001 ● ISO 45001 ● ISO 14001 ● IATF 16949

Manufacturing

● MES ● ERP ● SPC

Fab

● FMCS ● Whole fab monitoring