制造工厂与设备
Wafer Plants
➤ SSP/ DSP/ SOI & POI wafer production plant：
● Area：6000 m²
● Class 10：1000 m²
➤ Silicon epitaxial wafer production plant：
● Area：5000 m²
● Class 10：3500 m²
➤ SiC epitaxial wafer production plant：
● Area：4000 m²
● Class 10：1200 m²
➤ Compound production plant ：
● Area：14000 m² (under construction)
Wafer Capacity
(Equivalent to 6”)
Metrology
FTIR
MVC
SRP
WLTT
AFM
HALL
4PP
QC
S600
ADE
MC
ICPMS
KLA8520
Quality System/Certificate
Quality
● ISO 9001
● ISO 45001
● ISO 14001
● IATF 16949
Manufacturing
● MES
● ERP
● SPC
Fab
● FMCS
● Whole fab monitoring
